HIGHLY ORIENTED ZNO FILMS PREPARED BY MOCVD FROM DIETHYLZINC AND ALCOHOLS

被引：78

作者：

ODA, S ^{[1
]}

TOKUNAGA, H ^{[1
]}

KITAJIMA, N ^{[1
]}

HANNA, J ^{[1
]}

SHIMIZU, I ^{[1
]}

KOKADO, H ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,GRAD SCH NAGATSUTA,IMAGING SCI & ENGN LAB,MIDORI KU,YOKOHAMA,KANAGAWA 227,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 12期

关键词：

D O I：

10.1143/JJAP.24.1607

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1607 / 1610

页数：4

共 10 条

[1] HIGHLY ORIENTED ZINC-OXIDE FILMS GROWN BY THE OXIDATION OF DIETHYLZINC
GHANDHI, SK
FIELD, RJ
SHEALY, JR
[J]. APPLIED PHYSICS LETTERS, 1980, 37 (05) : 449 - 451
[2] DC REACTIVE MAGNETRON SPUTTERED ZNO FILMS
HATA, T
MINAMIKAWA, T
MORIMOTO, O
HADA, T
[J]. JOURNAL OF CRYSTAL GROWTH, 1979, 47 (02) : 171 - 176
[3] GROWTH OF EPITAXIAL ZNO THIN-FILMS BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION
LAU, CK
TIKU, SK
LAKIN, KM
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (08) : 1843 - 1847
[4] CRYSTALLOGRAPHIC CHARACTER OF ZNO THIN-FILM FORMED AT LOW SPUTTERING GAS-PRESSURE
MIURA, M
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1982, 21 (02): : 264 - 271
[5] PROPERTIES OF ZINC-OXIDE FILMS PREPARED BY THE OXIDATION OF DIETHYL ZINC
ROTH, AP
WILLIAMS, DF
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (11) : 6685 - 6692
[6] PLASMA-ENHANCED METALORGANIC CHEMICAL VAPOR-DEPOSITION OF C-AXIS ORIENTED AND EPITAXIAL-FILMS OF ZNO AT LOW SUBSTRATE TEMPERATURES
SHIOSAKI, T
YAMAMOTO, T
YAGI, M
KAWABATA, A
[J]. APPLIED PHYSICS LETTERS, 1981, 39 (05) : 399 - 401
[7] OPTICAL-PROPERTIES OF SINGLE-CRYSTALLINE ZNO FILM SMOOTHLY CHEMICAL-VAPOR DEPOSITED ON INTERMEDIATELY SPUTTERED THIN ZNO FILM ON SAPPHIRE
SHIOSAKI, T
OHNISHI, S
KAWABATA, A
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (05) : 3113 - 3117
[8] LASER-INDUCED DEPOSITION OF ZINC-OXIDE
SOLANKI, R
COLLINS, GJ
[J]. APPLIED PHYSICS LETTERS, 1983, 42 (08) : 662 - 663
[9] MOCVD GROWTH OF ZNSE FILMS USING DIETHYLSELENIDE
SRITHARAN, S
JONES, KA
[J]. JOURNAL OF CRYSTAL GROWTH, 1984, 66 (01) : 231 - 234
[10] THE USE OF HETEROCYCLIC-COMPOUNDS IN THE ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION OF EPITAXIAL ZNS, ZNSE AND ZNO
WRIGHT, PJ
GRIFFITHS, RJM
COCKAYNE, B
[J]. JOURNAL OF CRYSTAL GROWTH, 1984, 66 (01) : 26 - 34

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