HIGH-QUALITY CRYSTALLINE YBA2CU3O7-DELTA FILMS ON THIN SILICON SUBSTRATES

被引：24

作者：

HAAKENAASEN, R ^{[1
]}

FORK, DK ^{[1
]}

GOLOVCHENKO, JA ^{[1
]}

机构：

[1] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304

来源：

APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 12期

关键词：

D O I：

10.1063/1.111843

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

YBa2Cu3O7-delta(001) (YBCO) films with near perfect crystallinity have been grown epitaxially on Si(100) using two intermediate buffer layers: Yttrium-stabilized zirconia (YSZ) and CeO2. All layers were grown by an in situ pulsed laser deposition process. The new films have Rutherford backscattering spectroscopy minimum yields as low as 5%, compared to 12% for YBCO films deposited directly on YSZ. The superconducting onset is above 90 K with a transition width DELTAT of 1 K. After film deposition the Si substrate could be etched from the back to give a circular, 2-mm-diam, 4000 angstrom uniformly thick Si membrane with 300 angstrom YSZ, 80 angstrom CeO2, and 1500-3000 angstrom YBCO on top.

引用

收藏

页码：1573 / 1575

页数：3

相关论文

共 16 条

[1] ANISOTROPIC ETCHING OF SILICON [J].

BEAN, KE .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) :1185-1193

[2] HIGH-QUALITY EPITAXY OF YBA2CU3O7-X ON SILICON-ON-SAPPHIRE WITH THE MULTIPLE BUFFER LAYER YSZ/CEO2 [J].

COPETTI, CA ;

SOLTNER, H ;

SCHUBERT, J ;

ZANDER, W ;

HOLLRICHER, O ;

BUCHAL, C ;

SCHULZ, H ;

TELLMANN, N ;

KLEIN, N .

APPLIED PHYSICS LETTERS, 1993, 63 (10) :1429-1431

[3] SILICON SURFACE PASSIVATION BY HYDROGEN TERMINATION - A COMPARATIVE-STUDY OF PREPARATION METHODS [J].

FENNER, DB ;

BIEGELSEN, DK ;

BRINGANS, RD .

JOURNAL OF APPLIED PHYSICS, 1989, 66 (01) :419-424

[4] Buffer Layers for High-Quality Epitaxial YBCO Films on Si [J].

Fork, David K. ;

Fenner, David B. ;

Barrera, Adrian ;

Phillips, Julia M. ;

Geballe, Theodore H. ;

Connell, G. A. N. ;

Boyce, James B. .

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1991, 1 (01) :67-73

[5] EFFECTS OF HOMOEPITAXIAL SURFACES AND INTERFACE COMPOUNDS ON THE INPLANE EPITAXY OF YBCO FILMS ON YTTRIA-STABILIZED ZIRCONIA [J].

FORK, DK ;

GARRISON, SM ;

HAWLEY, M ;

GEBALLE, TH .

JOURNAL OF MATERIALS RESEARCH, 1992, 7 (07) :1641-1651

[6] HIGH CRITICAL CURRENTS IN STRAINED EPITAXIAL YBA2CU3O7-DELTA ON SI [J].

FORK, DK ;

FENNER, DB ;

BARTON, RW ;

PHILLIPS, JM ;

CONNELL, GAN ;

BOYCE, JB ;

GEBALLE, TH .

APPLIED PHYSICS LETTERS, 1990, 57 (11) :1161-1163

[7] ION-CHANNELING ANOMALIES AT THE SUPERCONDUCTING TRANSITION-TEMPERATURE IN SINGLE-CRYSTAL YBA2CU3O7-Y [J].

HAGA, T ;

YAMAYA, K ;

ABE, Y ;

TAJIMA, Y ;

HIDAKA, Y .

PHYSICAL REVIEW B, 1990, 41 (01) :826-829

[8] THERMAL VIBRATIONS IN SI STUDIED BY CHANNELING-RADIATION SPECTROSCOPY [J].

HAU, LV ;

LAEGSGAARD, E ;

ANDERSEN, JU .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 48 (1-4) :244-247

[9] CHANNELING RADIATION BEYOND THE CONTINUUM MODEL - THE PHONON LAMB SHIFT AND HIGHER-ORDER CORRECTIONS [J].

HAU, LV ;

ANDERSEN, JU .

PHYSICAL REVIEW A, 1993, 47 (05) :4007-4032

[10] FREESTANDING MICROSTRUCTURES OF YBA2CU3O7-DELTA - A HIGH-TEMPERATURE SUPERCONDUCTING AIR BRIDGE [J].

LEE, LP ;

BURNS, MJ ;

CHAR, K .

APPLIED PHYSICS LETTERS, 1992, 61 (22) :2706-2708