A GAP DECOMPOSITION SOURCE FOR PRODUCING A DIMER PHOSPHORUS MOLECULAR-BEAM FREE OF GALLIUM AND TETRAMER PHOSPHORUS

被引：24

作者：

MONDRY, MJ ^{[1
]}

CAINE, EJ ^{[1
]}

KROEMER, H ^{[1
]}

机构：

[1] UNIV CALIF SANTA BARBARA,DEPT ELECT & COMP ENGN,SANTA BARBARA,CA 93106

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 02期

关键词：

D O I：

10.1116/1.573257

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：316 / 318

页数：3

共 6 条

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DAVIES, GJ ;

HECKINGBOTTOM, R ;

OHNO, H ;

WOOD, CEC ;

CALAWA, AR .

[4] INTERACTION KINETICS OF AS2 AND GA ON [100] GAAS SURFACES [J].

FOXON, CT ;

JOYCE, BA .

[5] PHASE EQUILIBRIA IN GAAS AND GAP SYSTEMS [J].

THURMOND, CD .

WRIGHT, SL ;

KROEMER, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (02) :143-148