A PH3 CRACKING FURNACE FOR MOLECULAR-BEAM EPITAXY

被引：34

作者：

CHOW, R

CHAI, YG

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 01期

关键词：

D O I：

10.1116/1.572309

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

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页码：49 / 54

页数：6

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