ISLAND FORMATION DURING GROWTH OF GE ON SI(100) - A STUDY USING PHOTOLUMINESCENCE SPECTROSCOPY

被引:254
作者
SUNAMURA, H [1 ]
USAMI, N [1 ]
SHIRAKI, Y [1 ]
FUKATSU, S [1 ]
机构
[1] UNIV TOKYO,DEPT PURE & APPL SCI,MEGURO KU,TOKYO 153,JAPAN
关键词
D O I
10.1063/1.114265
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present a photoluminescence (PL) study on the growth mode changeover during growth of Ge on Si(100) substrates. Intense PL signals originating from both the flat Ge layer and the three-dimensional (3D) Ge islands are observed from Si/Ge/Si quantum wells with various Ge coverage. The onset of the 3D island formation is determined to be 3.7 monolayers (ML). It is also found that the 3D islands grow with only 3.0 ML of the flat Ge layer retained. This implies that only the 3.0 ML Ge is thermodynamically stable on Si(100) and hence corresponds to the]] equilibrium" critical thickness.© 1995 American Institute of Physics.
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页码:3024 / 3026
页数:3
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