SPUTTERING OF MULTICOMPONENT MATERIALS - THE DIFFUSION LIMIT

被引：36

作者：

OLIVA, A ^{[1
]}

KELLY, R ^{[1
]}

FALCONE, G ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

SURFACE SCIENCE | 1986年 / 166卷 / 2-3期

关键词：

D O I：

10.1016/0039-6028(86)90688-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：403 / 418

页数：16

共 24 条

[1] SURFACE SEGREGATION DURING ALLOY SPUTTERING AND IMPLANTATION
ANDERSEN, HH
STENUM, B
SORENSEN, T
WHITLOW, HJ
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 487 - 494
[2] PREFERENTIAL SPUTTERING OF BINARY-ALLOYS WITH DIFFUSION - EQUILIBRIUM DISTRIBUTION
COLLINS, R
[J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 37 (1-2): : 13 - 19
[3] ON THE COLLECTIVE CURRENT CONCEPT IN THE THEORY OF ATOMIC MIXING
COLLINS, R
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) : 809 - 813
[4] THE DIFFUSION-APPROXIMATION IN ATOMIC MIXING
COLLINS, R
MARSH, T
JIMENEZRODRIGUEZ, JJ
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 147 - 156
[5] IMPLANT DIFFUSION WITH POSITION-DEPENDENT DIFFUSION-COEFFICIENT
COLLINS, R
[J]. RADIATION EFFECTS LETTERS, 1981, 58 (05): : 133 - 137
[6] ATOMIC MIXING IN THE DEPTH-DEPENDENT DIFFUSION-APPROXIMATION
COLLINS, R
JIMENEZRODRIGUEZ, JJ
[J]. RADIATION EFFECTS LETTERS, 1982, 68 (01): : 19 - 23
[7] RECOIL IMPLANTATION FROM A THIN SOURCE .2. EXTENSION TO PROBLEMS OF RECOIL SPUTTERING AND OF MODERATELY THICK SOURCES
DZIOBA, S
KELLY, R
[J]. JOURNAL OF NUCLEAR MATERIALS, 1978, 76-7 (1-2) : 175 - 182
[8] DIFFUSION ENHANCEMENT DUE TO LOW-ENERGY ION-BOMBARDMENT DURING SPUTTER ETCHING AND DEPOSITION
ELTOUKHY, AH
GREENE, JE
[J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (08) : 4444 - 4452
[9] SPUTTERING OF MULTICOMPONENT MATERIALS - NUMERICAL-SOLUTION OF THE BALANCE EQUATION
FALCONE, G
OLIVA, A
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 33 (03): : 175 - 178
[10] ON THE INFLUENCE OF ATOMIC MIXING ON THE EVOLUTION OF ION-IMPLANTATION PROFILES
GRASMARTI, A
JIMENEZRODRIGUEZ, JJ
PEONFERNANDEZ, J
RODRIGUEZVIDAL, M
[J]. PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1982, 45 (01): : 191 - 203

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