A NEW EMPIRICAL-FORMULA FOR THE SPUTTERING YIELD

被引：37

作者：

YAMAMURA, Y ^{[1
]}

MATSUNAMI, N ^{[1
]}

ITOH, N ^{[1
]}

机构：

[1] NAGOYA UNIV,FAC ENGN,DEPT CRYSTALLINE MAT SCI,NAGOYA,AICHI 464,JAPAN

来源：

RADIATION EFFECTS LETTERS | 1982年 / 68卷 / 03期

关键词：

D O I：

10.1080/01422448208226913

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：83 / 87

页数：5

共 9 条

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MATSUNAMI, N ;

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RADIATION EFFECTS LETTERS, 1980, 57 (1-2) :15-21

[7]

Matsunami N., 1980, IPPJAM14 NAG U I PLA

[8] THEORY OF SPUTTERING .I. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS [J].

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[9]

YAMAMURA Y, UNPUB RAD EFF

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