HIGH-SPEED LASER WRITING OF GOLD LINES FROM ORGANIC SOLUTIONS

被引:11
作者
BALI, K
SZORENYI, T
BROOK, MR
SHAFEEV, GA
机构
[1] RES GRP LASER PHYS, H-6720 SZEGED, HUNGARY
[2] RUSSIAN ACAD SCI, INST GEN PHYS, MOSCOW, RUSSIA
基金
匈牙利科学研究基金会;
关键词
D O I
10.1016/0169-4332(93)90485-T
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A systematic study on pyrolytic laser writing of gold from organic solutions of triphenylphosphine gold (1) complexes reveals that essentially structureless tracks of electrical resistivities between 9 and 22 muOMEGA . cm can be deposited at 3-50 mW power and writing speeds of the order of mm/s. It is shown that under optimized conditions laser deposition from solutions is a competitive method with economic writing speeds and material properties appropriate for practical applications.
引用
收藏
页码:75 / 78
页数:4
相关论文
共 17 条
[2]   LASER CHEMICAL VAPOR-DEPOSITION OF GOLD [J].
BAUM, TH ;
JONES, CR .
APPLIED PHYSICS LETTERS, 1985, 47 (05) :538-540
[3]   LASER CHEMICAL VAPOR-DEPOSITION OF GOLD .2. [J].
BAUM, TH ;
JONES, CR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (05) :1187-1191
[4]  
BROOK MR, 1991, APPL PHYS A-MATER, V52, P78
[5]   LASER-INITIATED MICROCHEMISTRY - DYNAMIC PROBES OF METALLOPOLYMER THIN-FILM DECOMPOSITION [J].
FISANICK, GJ ;
HOPKINS, JB ;
GROSS, ME ;
FENNELL, MD ;
SCHNOES, KJ .
APPLIED PHYSICS LETTERS, 1985, 46 (12) :1184-1186
[6]   LASER-INITIATED MICROCHEMISTRY IN THIN-FILMS - DEVELOPMENT OF NEW TYPES OF PERIODIC STRUCTURE [J].
FISANICK, GJ ;
GROSS, ME ;
HOPKINS, JB ;
FENNELL, MD ;
SCHNOES, KJ ;
KATZIR, A .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) :1139-1142
[7]   LASER-INITIATED DEPOSITION REACTIONS - MICROCHEMISTRY IN ORGANOGOLD POLYMER-FILMS [J].
GROSS, ME ;
FISANICK, GJ ;
GALLAGHER, PK ;
SCHNOES, KJ ;
FENNELL, MD .
APPLIED PHYSICS LETTERS, 1985, 47 (09) :923-925
[8]   FAST LASER WRITING OF COPPER AND IRIDIUM LINES FROM THIN SOLID-SURFACE LAYERS OF METALORGANIC COMPOUNDS [J].
HOFFMANN, P ;
LECOHIER, B ;
GOLDONI, S ;
VANDENBERGH, H .
APPLIED SURFACE SCIENCE, 1989, 43 (1-4) :54-60
[9]   LASER WRITING OF HIGH-PURITY GOLD TRACKS [J].
JUBBER, M ;
WILSON, JIB ;
DAVIDSON, JL ;
FERNIE, PA ;
JOHN, P .
APPLIED SURFACE SCIENCE, 1989, 43 :74-80
[10]   LASER WRITING OF HIGH-PURITY GOLD LINES [J].
JUBBER, M ;
WILSON, JIB ;
DAVIDSON, JL ;
FERNIE, PA ;
JOHN, P .
APPLIED PHYSICS LETTERS, 1989, 55 (14) :1477-1479