SIMS EVALUATION OF CONTAMINATION ON ION-CLEANED (100) INP SUBSTRATES

被引：21

作者：

DOWSETT, MG ^{[1
]}

KING, RM ^{[1
]}

PARKER, EHC ^{[1
]}

机构：

[1] SIR JOHN CASS SCH SCI & TECHNOL,DEPT PHYS,LONDON EC3N 2EY,ENGLAND

来源：

APPLIED PHYSICS LETTERS | 1977年 / 31卷 / 08期

关键词：

D O I：

10.1063/1.89765

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：529 / 531

页数：3

相关论文

共 13 条

[1] COMPOSITIONAL AND STRUCTURAL-CHANGES THAT ACCOMPANY THERMAL ANNEALING OF (100) SURFACES OF GAAS, INP AND GAP IN VACUUM
BAYLISS, CR
KIRK, DL
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1976, 9 (02) : 233 - &
[2] DEVELOPMENTS IN SECONDARY ION MASS-SPECTROSCOPY AND APPLICATIONS TO SURFACE STUDIES
BENNINGHOVEN, A
[J]. SURFACE SCIENCE, 1975, 53 (DEC) : 596 - 625
[3] MODIFICATION OF EXISTING APPARATUS FOR SIMS IN UHV
DOWSETT, MG
KING, RM
PARKER, EHC
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1975, 8 (08): : 704 - 708
[4] DOWSETT MG, UNPUBLISHED
[5] GROWTH OF INDIUM-PHOSPHIDE FILMS FROM IN AND P2 BEAMS IN ULTRAHIGH-VACUUM
FARROW, RFC
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1974, 7 (11) : L121 - L124
[6] FARROW RL, COMMUNICATION
[7] MOLECULAR-BEAM EPITAXIAL-GROWTH OF INP
MATSUSHIMA, Y
HIROFUJI, Y
GONDA, S
MUKAI, S
KIMATA, M
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (12) : 2321 - 2325
[8] MOLECULAR-BEAM EPITAXIAL-GROWTH OF INP
MCFEE, JH
MILLER, BI
BACHMANN, KJ
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (02) : 259 - 272
[9] MEGGITT BT, UNPUBLISHED
[10] COMPOSITION OF BINARY-ALLOYS BY SIMULTANEOUS SIMS AND AES MEASUREMENTS
NARUSAWA, T
SATAKE, T
KOMIYA, S
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 514 - 518