GROWTH-KINETICS OF NISI ON (100) AND (111) SILICON

被引：16

作者：

MAJNI, G

DELLAVALLE, F

NOBILI, C

机构：

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1984年 / 17卷 / 05期

关键词：

D O I：

10.1088/0022-3727/17/5/002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L77 / L81

页数：5

共 15 条

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