PREPARATION OF BETA-SIC FILMS BY RF SPUTTERING

被引：5

作者：

NISHINO, S ^{[1
]}

MATSUNAMI, H ^{[1
]}

ODAKA, M ^{[1
]}

TANAKA, T ^{[1
]}

机构：

[1] KYOTO UNIV,FAC ENGN,DEPT ELECTR,KYOTO 606,JAPAN

来源：

THIN SOLID FILMS | 1977年 / 40卷 / JAN期

关键词：

D O I：

10.1016/0040-6090(77)90096-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：L27 / L29

页数：3

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