GROWTH MORPHOLOGY AND CRYSTALLOGRAPHIC ORIENTATION OF BETA-SIC FILMS FORMED BY CHEMICAL CONVERSION

被引：30

作者：

LEARN, AJ

KHAN, IH

机构：

来源：

THIN SOLID FILMS | 1970年 / 5卷 / 03期

关键词：

D O I：

10.1016/0040-6090(70)90073-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：145 / &

共 11 条

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