PHASE SEGREGATION OF CU IN AL-CU THIN-FILMS

被引：7

作者：

BURKSTRAND, JM

HOVLAND, CT

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.571944

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：449 / 451

页数：3

共 7 条

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[2]

CHAUDHARI P, 1977, Patent No. 4012756

[3]

DAVIS LE, 1976, HDB AUGER ELECTRON S

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HARTSOUGH, LD .

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[5] HILLOCK GROWTH ON VACUUM-DEPOSITED ALUMINUM FILMS [J].

HERMAN, DS ;

SCHUSTER, MA ;

GERBER, RM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01) :515-&

[6] ALUMINUM-ALLOY FILM DEPOSITION AND CHARACTERIZATION [J].

LEARN, AJ .

MADER, S ;

HERD, S .