ANALYSIS AND OPTIMIZATION OF CLOSED-LOOP VACUUM CONTROL-SYSTEMS

被引：2

作者：

FERRAN, RJ

SULLIVAN, JJ

机构：

[1] MKS INSTR INC,BURLINGTON,MA 01803

[2] GRANVILLE PHILLIPS CO,BOULDER,CO 80303

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.568609

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：560 / 563

页数：4

共 6 条

[1] DUSHMAN S, 1962, SCIENTIFIC FOUNDATIO, P108
[2] GRAHAM D, 1954, T AIEE, V73, P10
[3] HIGH-VACUUM VALVE WITH A PROGRAMMED OPENING RATE
HABLANIA.MH
LANDFORS, AA
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 344 - 346
[4] ADVANCES IN DIFFUSION PUMP TECHNOLOGY
HABLANIAN, MH
MALIAKAL, JC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01): : 58 - 64
[5] SOME SPECIAL PUMPING PROBLEMS ASSOCIATED WITH SPUTTERING APPLICATION
LAMONT, LT
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01): : 251 - 253
[6] VACUUM SYSTEMS FOR SPUTTERING
SHIRN, GA
PATTERSON, WL
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1970, 7 (03): : 453 - +