SIMS ANALYSIS OF HYDROGEN IN SI SAMPLES

被引：1

作者：

BESOCKE, K

FLENTJE, G

BAY, HL

HOFER, WO

LITTMARK, U

机构：

来源：

FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE | 1984年 / 319卷 / 6-7期

关键词：

D O I：

10.1007/BF01226754

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：712 / 713

页数：2

共 5 条

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[2]

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[5] PROFILING HYDROGEN IN MATERIALS USING ION-BEAMS [J].

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WU, CP ;

WILLIAMS, P ;

WHITE, CW ;

TERREAULT, B ;

SCHERZER, BMU ;

SCHULTE, RL ;

SCHNEID, EJ ;

MAGEE, CW ;

LIGEON, E ;

LECUYER, J ;

LANFORD, WA ;

KUEHNE, FJ ;

KAMYKOWSKI, EA ;

HOFER, WO ;

GUIVARCH, A ;

FILLEUX, CH ;

DELINE, VR ;

EVANS, CA ;

COHEN, BL ;

CLARK, GJ ;

CHU, WK ;

BRASSARD, C ;

BLEWER, RS ;

BEHRISCH, R ;

APPLETON, BR ;

ALLRED, DD .

NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3) :19-39

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