ELECTRON-BEAM DECOMPOSITION OF CDCL2

被引：8

作者：

GREEN, M

AIDINIS, CJ

FAKOLUJO, OA

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 02期

关键词：

D O I：

10.1063/1.334754

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：631 / 633

页数：3

共 9 条

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[8] NEW INORGANIC ELECTRON RESIST SYSTEM FOR HIGH-RESOLUTION LITHOGRAPHY [J].

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