EFFECTS OF HIGH-ENERGY BORON IONS IMPLANTED IN MOSFETS

被引：4

作者：

DENG, E

WONG, H

CHEUNG, NW

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 21卷 / 2-4期

关键词：

D O I：

10.1016/0168-583X(87)90812-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：134 / 141

页数：8

共 11 条

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[9] PROFILE STUDIES OF MEV IONS IMPLANTED INTO SI [J].

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