THEORETICAL-STUDIES OF THE ELECTRON-SCATTERING EFFECT ON DEVELOPED PATTERN PROFILES IN X-RAY-LITHOGRAPHY

被引：37

作者：

MURATA, K

机构：

来源：

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D O I：

10.1063/1.334740

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：575 / 580

页数：6

共 21 条

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