DETERMINATION OF THE CENTROID DEPTHS OF THE DEPTH PROFILES OF ION-IMPLANTED ANALYTES BY ANGLE-RESOLVED ELECTRON MICROBEAM ANALYSIS

被引：12

作者：

GRIES, WH

KOSCHIG, W

机构：

[1] Research Institute of the Deutsche Bundespost TELEKOM, Darmstadt, D-6100

来源：

SURFACE AND INTERFACE ANALYSIS | 1990年 / 16卷 / 1-12期

关键词：

D O I：

10.1002/sia.740160168

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Angle‐resolved signal ratio electron microbeam analysis (AR/SR/EMA) was applied for the determination of the centroid depth of the ion‐implanted depth profile of 100 keV 1016 cm−2 P in Si. The experiment is part of an investigation on the suitability of AR/SR/EMA for application in the (non‐destructive) calibration of ion‐implanted reference materials. Copyright © 1990 John Wiley & Sons Ltd.

引用

收藏

页码：321 / 324

页数：4

相关论文

共 13 条

[1] A FURTHER IMPROVEMENT IN THE GAUSSIAN PHI(RHO-Z) APPROACH FOR MATRIX CORRECTION IN QUANTITATIVE ELECTRON-PROBE MICROANALYSIS [J].

BASTIN, GF ;

HEIJLIGERS, HJM ;

VANLOO, FJJ .

SCANNING, 1986, 8 (02) :45-67

[2]

BRICE DK, 1974, SCRR710599 SAND LAB

[3] QUANTITATIVE ELECTRON-PROBE MICROANALYSIS USING GAUSSIAN PHI(RHO-ZETA) CURVES [J].

BROWN, JD ;

PACKWOOD, RH .

X-RAY SPECTROMETRY, 1982, 11 (04) :187-193

[4]

Burenkov A.F., 1986, TABLES ION IMPLANTAT

[5] THEORETICAL CONSIDERATIONS ON LATERAL SPREAD OF IMPLANTED IONS [J].

FURUKAWA, S ;

ISHIWARA, H ;

MATSUMURA, H .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1972, 11 (02) :134-+

[6]

GIBBONS JF, 1975, PROJECTED RANGE STAT

[7] NON-DESTRUCTIVE CENTROID DEPTH DETERMINATION OF ANALYTE PROFILES USING INTENSITY ATTENUATION IN PHOTON AND ELECTRON SPECTROSCOPIES [J].

GRIES, WH .

SURFACE AND INTERFACE ANALYSIS, 1988, 12 (1-12) :167-169

[8] AN EVALUATION OF THE CAPABILITIES OF PHOTON AND ELECTRON SPECTROSCOPIES FOR NONDESTRUCTIVE QUANTITATIVE MEASUREMENTS ON ANALYTE DEPTH PROFILES BY THE ANGLE-RESOLVED SIGNAL RATIO METHOD [J].

GRIES, WH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03) :1655-1662

[9] THE VERSAILLES PROJECT ON ADVANCED MATERIALS AND STANDARDS (VAMAS) PROJECT ON ION-IMPLANTED REFERENCE MATERIALS FOR SURFACE-ANALYSIS - SEPTEMBER 1988 [J].

GRIES, WH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03) :1639-1640

[10] DETERMINATION OF THE CENTROID DEPTHS OF SHALLOW IMPURITY PROFILES BY X-RAY-FLUORESCENCE SPECTROMETRY [J].

GRIES, WH ;

WYBENGA, FT .

SURFACE AND INTERFACE ANALYSIS, 1981, 3 (06) :251-257