THE VERSAILLES PROJECT ON ADVANCED MATERIALS AND STANDARDS (VAMAS) PROJECT ON ION-IMPLANTED REFERENCE MATERIALS FOR SURFACE-ANALYSIS - SEPTEMBER 1988

被引：11

作者：

GRIES, WH

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.576063

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1639 / 1640

页数：2

共 6 条

[1] QUANTITATIVE ION-IMPLANTATION - THEORETICAL ASPECTS [J].

GRIES, WH .

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1979, 30 (02) :97-112

GRIES, WH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03) :1655-1662

[3] QUANTITATIVE ION-IMPLANTATION - PRACTICE [J].

GRIES, WH .

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1979, 30 (02) :113-125

[4]

GRIES WH, IN PRESS

[5] THE DEVELOPMENT OF STANDARDS FOR SURFACE-ANALYSIS [J].

POWELL, CJ .

[6] SIMS ANALYSIS OF ISOTOPIC IMPURITIES IN ION IMPLANTS [J].

SYKES, DE ;

BLUNT, RT .