RADICAL SPECIES IN ARGON-SILANE DISCHARGES

被引：140

作者：

ROBERTSON, R ^{[1
]}

HILS, D ^{[1
]}

CHATHAM, H ^{[1
]}

GALLAGHER, A ^{[1
]}

机构：

[1] NBS,BOULDER,CO 80309

来源：

APPLIED PHYSICS LETTERS | 1983年 / 43卷 / 06期

关键词：

D O I：

10.1063/1.94413

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：544 / 546

页数：3

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