SIO2 THICKNESSES DETERMINATION BY REFLECTION ELLIPSOMETRY - SUBSTRATE EFFECTS

被引：6

作者：

ADAMS, JR ^{[1
]}

BASHARA, NM ^{[1
]}

机构：

[1] UNIV NEBRASKA,COLL ENGN,ELECT MAT LAB,LINCOLN,NB 68508

来源：

SURFACE SCIENCE | 1975年 / 47卷 / 02期

关键词：

D O I：

10.1016/0039-6028(75)90210-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：655 / 660

页数：6

相关论文

共 6 条

[1] POLARIZATION CHARACTERISTICS OF SCATTERED RADIATION FROM A DIFFRACTION GRATING BY ELLIPSOMETRY WITH APPLICATION TO SURFACE-ROUGHNESS
AZZAM, RMA
BASHARA, NM
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[2] SPECIMEN COHERENT SCATTERING AND COMPENSATOR DEFECTS IN ELLIPSOMETRY
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (09) : 1236 - &
[3] ERROR ANALYSIS OF ANGLE OF INCIDENCE MEASUREMENTS
SCHUELER, DG
[J]. SURFACE SCIENCE, 1969, 16 : 104 - &
[4] Svitashev K. K., 1973, Optics and Spectroscopy, V34, P542
[5] SVITASHEV KK, 1971, OPT SPECTROSC, V32, P288
[6] ELLIPSOMETRIC STUDY OF A THIN TRANSPARENT FILM OVERLAID ON A TRANSPARENT SUBSTRATE HAVING A SURFACE LAYER
YOKOTA, H
[J]. SURFACE SCIENCE, 1969, 16 : 275 - &