CZOCHRALSKI GROWTH OF SILICON

被引:106
作者
ZULEHNER, W
机构
关键词
D O I
10.1016/0022-0248(83)90051-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
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页码:189 / 213
页数:25
相关论文
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