MONTE-CARLO-FLUID HYBRID MODEL OF THE ACCUMULATION OF DUST PARTICLES AT SHEATH EDGES IN RADIOFREQUENCY DISCHARGES

被引：93

作者：

SOMMERER, TJ ^{[1
]}

BARNES, MS ^{[1
]}

KELLER, JH ^{[1
]}

MCCAUGHEY, MJ ^{[1
]}

KUSHNER, MJ ^{[1
]}

机构：

[1] IBM CORP,E FISHKILL FACIL,HOPEWELL JUNCTION,NY 12533

来源：

APPLIED PHYSICS LETTERS | 1991年 / 59卷 / 06期

关键词：

D O I：

10.1063/1.105409

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Particulate contamination (dust) has been observed to accumulate near the sheath-plasma boundary in both radio-frequency (rf) and direct-current (dc) discharges. We have developed and applied a hybrid Monte Carlo-fluid simulation of electron, ion, and charged dust transport in rf discharges to investigate the dynamics of particulate contamination. The processes governing the transport of charged dust in the model are drift of partially shielded particles in the electric field, collisions with the fill gases, and viscous ion drag arising from Coulomb interactions of particles with ions drifting and diffusing in the plasma. We find that negatively charged dust particles accumulate near the sheath-plasma boundary, and that transport of the particles is dominated by ion drag.

引用

页码：638 / 640

页数：3

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