INVESTIGATION OF THE AMORPHOUS-TO-MICROCRYSTALLINE TRANSITION OF HYDROGENATED SILICON FILMS BY SPECTROSCOPIC ELLIPSOMETRY

被引：15

作者：

HERAK, TV

SCHELLENBERG, JJ

SHUFFLEBOTHAM, PK

KAO, KC

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 02期

关键词：

D O I：

10.1063/1.341962

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：688 / 693

页数：6

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