ION MIXING OF MARKERS IN SIO2 AND SI

被引:27
作者
BARCZ, AJ [1 ]
PAINE, BM [1 ]
NICOLET, MA [1 ]
机构
[1] CALTECH,PASADENA,CA 91125
关键词
D O I
10.1063/1.94546
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:45 / 47
页数:3
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共 17 条
  • [1] RADIATION EFFECTS ON SOLID-STATE DIFFUSION
    ADDA, Y
    BEYELER, M
    BREBEC, G
    [J]. THIN SOLID FILMS, 1975, 25 (01) : 107 - 156
  • [2] DEPTH RESOLUTION OF SPUTTER PROFILING
    ANDERSEN, HH
    [J]. APPLIED PHYSICS, 1979, 18 (02): : 131 - 140
  • [3] AVERBACK RS, 1983, P WORKSHOP ION MIXIN, P10
  • [4] CHEMICAL EFFECTS IN ION MIXING OF TRANSITION-METALS ON SIO2
    BANWELL, T
    LIU, BX
    GOLECKI, I
    NICOLET, MA
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 125 - 129
  • [5] RADIATION ENHANCED DIFFUSION IN SOLIDS
    DIENES, GJ
    DAMASK, AC
    [J]. JOURNAL OF APPLIED PHYSICS, 1958, 29 (12) : 1713 - 1721
  • [6] DIFFUSIVITY SUMMARY OF B, GA, P, AS, AND SB IN SIO2
    GHEZZO, M
    BROWN, DM
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (01) : 146 - 148
  • [7] Hansen M., 1958, J ELECTROCHEM SOC, DOI DOI 10.1149/1.2428700
  • [8] KEENAN JA, 1983, VLSI ELECTRONICS MIC, V6, P1
  • [9] ION-BEAM MIXING IN AMORPHOUS-SILICON .2. THEORETICAL INTERPRETATION
    MATTESON, S
    PAINE, BM
    NICOLET, MA
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 53 - 61
  • [10] ION MIXING
    MATTESON, S
    NICOLET, MA
    [J]. ANNUAL REVIEW OF MATERIALS SCIENCE, 1983, 13 : 339 - 362