INFLUENCE OF BOMBARDMENT BY ENERGETIC ATOMS ON C-AXIS ORIENTATION OF ZNO FILMS

被引：24

作者：

TOMINAGA, K

IWAMURA, S

FUJITA, I

SHINTANI, Y

TADA, O

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1982年 / 21卷 / 07期

关键词：

D O I：

10.1143/JJAP.21.999

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：999 / 1002

页数：4

共 11 条

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[8] HIGH-RATE EPITAXIAL-GROWTH OF ZNO FILMS ON SAPPHIRE BY PLANAR MAGNETRON RF SPUTTERING SYSTEM [J].

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[10] HIGH-ENERGY NEUTRAL ATOMS IN THE SPUTTERING OF ZNO [J].

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