PRESSURE-DEPENDENCE OF ELECTRON-TEMPERATURE USING RF-FLOATED ELECTROSTATIC PROBES IN RF PLASMAS

被引：30

作者：

CANTIN, A ^{[1
]}

GAGNE, RRJ ^{[1
]}

机构：

[1] UNIV LAVAL,DEPT ELECT ENGN,QUEBEC CITY 10,QUEBEC,CANADA

来源：

关键词：

D O I：

10.1063/1.89406

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：316 / 319

页数：4

共 15 条

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[2] INHERENT DIFFICULTIES IN USE OF ELECTROSTATIC PROBES IN RADIO FREQUENCY PLASMA
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GAGNE, RRJ
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[3] PROPER USE OF ELECTROSTATIC PROBES IN ELECTRODELESS RF PLASMAS
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[4] CANTIN A, 1974, IEE118 C PUBL, P625
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[8] INVESTIGATION OF AN RF PLASMA WITH SYMMETRICAL AND ASYMMETRICAL ELECTROSTATIC PROBES
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[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (06) : 2639 - &
[9] GRIGOROV G, 1966, INT J ELECTRON, V20, P363
[10] PROBE MEASUREMENTS IN AN ELECTRODELESS DISCHARGE
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