ION MIXING AND PHASE-DIAGRAMS

被引：71

作者：

LAU, SS ^{[1
]}

LIU, BX ^{[1
]}

NICOLET, MA ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91125

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期

关键词：

D O I：

10.1016/0167-5087(83)90787-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：97 / 105

页数：9

共 31 条

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[2] Baglin J.E.E., 1978, THIN FILMS INTERDIFF
[3] BANWELL T, COMMUNICATION
[4] CHAPMAN G, 1979, J APPL PHYS, V50, P321
[5] COMPARISON OF ANNEALING AND ION-IMPLANTATION EFFECTS DURING SOLID-STATE DISILICIDE FORMATION
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TSAI, MY
PETERSSON, CS
STRITZKER, B
[J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (04) : 3067 - 3069
[6] DHEURLE FM, 1982, UNPUB J APPL PHYS
[7] JOHNSON WL, 1982, MRS S P, V7, P183
[8] JOHNSON WL, 1981, GLASSY METALS, V1
[9] NIOBIUM SILICIDE FORMATION INDUCED BY AR-ION BOMBARDMENT
KANAYAMA, T
TANOUE, H
TSURUSHIMA, T
[J]. APPLIED PHYSICS LETTERS, 1979, 35 (03) : 222 - 224
[10] ION-BEAM MIXING OF METAL-SEMICONDUCTOR EUTECTIC SYSTEMS
LAU, SS
TSAUR, BY
VONALLMEN, M
MAYER, JW
STRITZKER, B
WHITE, CW
APPLETON, B
[J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 97 - 105