GRAIN-BOUNDARY SOLUTE ELECTROMIGRATION IN POLYCRYSTALLINE FILMS

被引:36
作者
HO, PS
HOWARD, JK
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
[2] IBM CORP,SYST PROD DIV,E FISHKILL,NY 12533
关键词
D O I
10.1063/1.1663763
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:3229 / 3233
页数:5
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