EFFECT OF GROWTH PARAMETERS ON FORMATION AND ELIMINATION OF VACANCY CLUSTERS IN DISLOCATION-FREE SILICON-CRYSTALS

被引:46
作者
DEKOCK, AJR [1 ]
ROKSNOER, PJ [1 ]
BOONEN, PGT [1 ]
机构
[1] PHILIPS RES LABS, EINDHOVEN, NETHERLANDS
关键词
D O I
10.1016/0022-0248(74)90176-6
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:311 / 320
页数:10
相关论文
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