A STUDY OF HYDROGENATED AMORPHOUS-SILICON DEPOSITED BY RF GLOW-DISCHARGE IN SILANE-HYDROGEN MIXTURES

被引：37

作者：

VANIER, PE

KAMPAS, FJ

CORDERMAN, RR

RAJESWARAN, G

机构：

来源：

关键词：

D O I：

10.1063/1.334191

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1812 / 1820

页数：9

共 50 条

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[10] MASS-SPECTROMETRIC STUDIES OF IMPURITIES IN SILANE AND THEIR EFFECTS ON THE ELECTRONIC-PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON
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