GRAIN-BOUNDARY DIFFUSION ACTIVATION-ENERGY DERIVED FROM SURFACE-ROUGHNESS MEASUREMENTS OF ALUMINUM THIN-FILMS

被引：24

作者：

LEVENSON, LL

机构：

来源：

关键词：

D O I：

10.1063/1.102270

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2617 / 2619

页数：3

共 16 条

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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03): : 1386 - 1391
[7] REVISED STRUCTURE ZONE MODEL FOR THIN-FILM PHYSICAL STRUCTURE
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