ELLIPSOMETRIC STUDIES OF POLISHED SILICON SURFACES

被引：18

作者：

OHLIDAL, M ^{[1
]}

OHLIDAL, I ^{[1
]}

LUKES, F ^{[1
]}

机构：

[1] PURKYNE UNIV, FAC SCI, DEPT SOLID STATE PHYS, CS-61137 BRNO, CZECHOSLOVAKIA

来源：

SURFACE SCIENCE | 1976年 / 55卷 / 02期

关键词：

D O I：

10.1016/0039-6028(76)90252-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：467 / 476

页数：10

相关论文

共 28 条

[1] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY
ARCHER, RJ
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) : 970 - &
[2] OPTICAL MEASUREMENT OF FILM GROWTH ON SILICON AND GERMANIUM SURFACES IN ROOM AIR
ARCHER, RJ
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1957, 104 (10) : 619 - 622
[3] Beaglehole D., 1970, Journal of Non-Crystalline Solids, V4, P272, DOI 10.1016/0022-3093(70)90051-7
[4] Bennet H.E., 1967, PHYS THIN FILMS, V4, P1
[5] BERNING PH, 1965, PHYS THIN FILMS, P91
[6] EFFECT OF SURFACE DAMAGE ON REFLECTANCE OF GERMANIUM IN 2650-10 000-A REGION
DONOVAN, TM
BENNETT, HE
ASHLEY, EJ
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1963, 53 (12) : 1403 - &
[7] GOLIKOV VI, 1973, SEMICONDUCTOR TECHNO, V13, P3
[8] ELLIPSOMETRIC STUDY OF 400 EV ION DAMAGE IN SILICON
IBRAHIM, MM
BASHARA, NM
[J]. SURFACE SCIENCE, 1972, 30 (03) : 632 - &
[9] PARAMETER-CORRELATION AND COMPUTATIONAL CONSIDERATIONS IN MULTIPLE-ANGLE ELLIPSOMETRY
IBRAHIM, MM
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (12) : 1622 - &
[10] JACOBSON R, 1967, PROGR OPTICS, P247