ELLIPSOMETRIC STUDIES OF POLISHED SILICON SURFACES

[21] TRANSMISSION ELECTRON MICROSCOPE INVESTIGATION OF REMOVAL OF MECHANICAL POLISHING DAMAGE ON SI AND GE BY CHEMICAL POLISHING [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (04) : 485 - 488

[22] SURFACE DAMAGE ON ABRADED SILICON SPECIMENS [J]. PHILOSOPHICAL MAGAZINE, 1963, 8 (89): : 859 - &

[23] NATURE OF THE DAMAGED LAYER ON ABRADED SILICON SPECIMENS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (08) : 743 - 744

[24] VASICEK A, 1957, MEASUREMENT PRODUCTI

[25] Vasicek A., 1960, OPTICS THIN FILMS

[26] CHARACTERIZATION OF REAL SURFACES BY ELLIPSOMETRY [J]. SURFACE SCIENCE, 1972, 29 (02) : 379 - &

[27] SIMULTANEOUS AND INDEPENDENT DETERMINATION OF REFRACTIVE INDEX AND THICKNESS OF THIN FILMS BY ELLIPSOMETRY [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1968, 58 (04) : 526 - +

[28] ZUKOVA LA, 1971, ELECTRONOGRAPHY SURF

[21] TRANSMISSION ELECTRON MICROSCOPE INVESTIGATION OF REMOVAL OF MECHANICAL POLISHING DAMAGE ON SI AND GE BY CHEMICAL POLISHING [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (04) : 485 - 488

[22] SURFACE DAMAGE ON ABRADED SILICON SPECIMENS [J]. PHILOSOPHICAL MAGAZINE, 1963, 8 (89): : 859 - &

[23] NATURE OF THE DAMAGED LAYER ON ABRADED SILICON SPECIMENS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (08) : 743 - 744

[24] VASICEK A, 1957, MEASUREMENT PRODUCTI

[25] Vasicek A., 1960, OPTICS THIN FILMS

[26] CHARACTERIZATION OF REAL SURFACES BY ELLIPSOMETRY [J]. SURFACE SCIENCE, 1972, 29 (02) : 379 - &

[27] SIMULTANEOUS AND INDEPENDENT DETERMINATION OF REFRACTIVE INDEX AND THICKNESS OF THIN FILMS BY ELLIPSOMETRY [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1968, 58 (04) : 526 - +

[28] ZUKOVA LA, 1971, ELECTRONOGRAPHY SURF