CHARACTERIZATION OF REAL SURFACES BY ELLIPSOMETRY

被引：48

作者：

VEDAM, K

SO, SS

机构：

来源：

SURFACE SCIENCE | 1972年 / 29卷 / 02期

关键词：

D O I：

10.1016/0039-6028(72)90226-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：379 / &

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[8] ERRORS ARISING FROM SURFACE ROUGHNESS IN ELLIPSOMETRIC MEASUREMENT OF REFRACTIVE INDEX OF A SURFACE
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[9] TRANSMISSION ELECTRON MICROSCOPY OF CLEAVED SILICON
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