INFLUENCE OF THE SUBSTRATE ON THE ANNEALING BEHAVIOR OF SPUTTER-DEPOSITED NI-CR FILMS

被引：12

作者：

ANKLAM, HJ

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(84)90525-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：61 / 68

页数：8

共 8 条

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[2]

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[5] SEGREGATION EFFECTS IN THIN-FILMS [J].

JOSHI, A ;

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DENISON, DR .

[6] EFFECT OF ATMOSPHERIC OXYGEN ON EVAPORATED CHROMIUM FILMS [J].

KLAUS, N .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (02) :201-205

[7] OXIDATION OF METALS [J].

LAWLESS, KR .

[8]

ROLL K, 1977, 7TH P INT VAC C 3RD, P935