THE STABILITY OF ALUMINUM-DOPED ZNO TRANSPARENT ELECTRODES FABRICATED BY SPUTTERING

被引：99

作者：

TAKATA, S

MINAMI, T

NANTO, H

机构：

来源：

THIN SOLID FILMS | 1986年 / 135卷 / 02期

关键词：

D O I：

10.1016/0040-6090(86)90125-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：183 / 187

页数：5

相关论文

共 7 条

[1] EFFECTS OF HEAT-TREATMENT ON OPTICAL AND ELECTRICAL-PROPERTIES OF INDIUM-TIN OXIDE-FILMS
HAINES, WG
BUBE, RH
[J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (01) : 304 - 307
[2] HIGHLY CONDUCTIVE AND TRANSPARENT ZINC-OXIDE FILMS PREPARED BY RF MAGNETRON SPUTTERING UNDER AN APPLIED EXTERNAL MAGNETIC-FIELD
MINAMI, T
NANTO, H
TAKATA, S
[J]. APPLIED PHYSICS LETTERS, 1982, 41 (10) : 958 - 960
[3] HIGHLY CONDUCTIVE AND TRANSPARENT ALUMINUM DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
MINAMI, T
NANTO, H
TAKATA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (05): : L280 - L282
[4] THE STABILITY OF ZINC-OXIDE TRANSPARENT ELECTRODES FABRICATED BY RF MAGNETRON SPUTTERING
MINAMI, T
NANTO, H
SHOOJI, S
TAKATA, S
[J]. THIN SOLID FILMS, 1984, 111 (02) : 167 - 174
[5] ELECTRICAL AND OPTICAL-PROPERTIES OF ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING FOR TRANSPARENT ELECTRODE APPLICATIONS
NANTO, H
MINAMI, T
SHOOJI, S
TAKATA, S
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (04) : 1029 - 1034
[6] TUETA R, 1981, THIN SOLID FILMS, V80, P161
[7] INVESTIGATION OF ELECTRICAL PROPERTIES OF ZINC-OXIDE THIN-FILMS INFLUENCED BY OXYGEN ADSORPTION
YEN, JC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 47 - 51