REVERSIBLE TRANSFORMATION OF DEFECTS IN HYDROGEN-IMPLANTED SILICON

[1] EPR OF A [001] SI INTERSTITIAL COMPLEX IN IRRADIATED SILICON [J]. PHYSICAL REVIEW B, 1976, 14 (03): : 872 - 883

[2] 1.8- 3.3- AND 3.9-MU BANDS IN IRRADIATED SILICON - CORRELATIONS WITH DIVACANCY [J]. PHYSICAL REVIEW, 1966, 152 (02): : 761 - +

[3] DISTRIBUTION OF IRRADIATION DAMAGE IN SILICON BOMBARDED WITH HYDROGEN [J]. PHYSICAL REVIEW B, 1977, 16 (09) : 3851 - 3859

[4] ION-INDUCED DEFECTS IN SEMICONDUCTORS [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 457 - 476

[5] NEW EPR SPECTRA IN IRRADIATED SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (02) : 864 - &

[6] FRANK W, 1979, I PHYS C SER, V46, P516

[7] THE SPATIAL-DISTRIBUTION OF SI INTERSTITIAL COMPLEX PRODUCED IN SILICON BY HYDROGEN-ION IMPLANTATION [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 49 (1-3): : 161 - 164

[8] EPR OF CONDUCTION ELECTRONS PRODUCED IN SILICON BY HYDROGEN-ION IMPLANTATION [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1974, 22 (01): : K55 - K57

[9] GORELKINSKII YV, 1977, P INT C ION IMPLAT 1, P5

[10] HALLER EE, 1977, I PHYS C SERIES, V31, P309

[1] EPR OF A [001] SI INTERSTITIAL COMPLEX IN IRRADIATED SILICON [J]. PHYSICAL REVIEW B, 1976, 14 (03): : 872 - 883

[2] 1.8- 3.3- AND 3.9-MU BANDS IN IRRADIATED SILICON - CORRELATIONS WITH DIVACANCY [J]. PHYSICAL REVIEW, 1966, 152 (02): : 761 - +

[3] DISTRIBUTION OF IRRADIATION DAMAGE IN SILICON BOMBARDED WITH HYDROGEN [J]. PHYSICAL REVIEW B, 1977, 16 (09) : 3851 - 3859

[4] ION-INDUCED DEFECTS IN SEMICONDUCTORS [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 457 - 476

[5] NEW EPR SPECTRA IN IRRADIATED SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (02) : 864 - &

[6] FRANK W, 1979, I PHYS C SER, V46, P516

[7] THE SPATIAL-DISTRIBUTION OF SI INTERSTITIAL COMPLEX PRODUCED IN SILICON BY HYDROGEN-ION IMPLANTATION [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 49 (1-3): : 161 - 164

[8] EPR OF CONDUCTION ELECTRONS PRODUCED IN SILICON BY HYDROGEN-ION IMPLANTATION [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1974, 22 (01): : K55 - K57

[9] GORELKINSKII YV, 1977, P INT C ION IMPLAT 1, P5

[10] HALLER EE, 1977, I PHYS C SERIES, V31, P309