PHOTOABLATION OF A GRAPHITE TARGET BY A KRF LASER-BEAM - REALIZATION OF HARD CARBON THIN-FILMS

被引：21

作者：

GERMAIN, C ^{[1
]}

GIRAULT, C ^{[1
]}

AUBRETON, J ^{[1
]}

CATHERINOT, A ^{[1
]}

BEC, S ^{[1
]}

TONCK, A ^{[1
]}

机构：

[1] ECOLE CENT LYON,TRIBOL & DYNAM SYST LAB,CNRS,URA 855,F-69131 ECULLY,FRANCE

来源：

关键词：

LASER ABLATION; AMORPHOUS CARBON; HARDNESS; INFRARED TRANSMISSION;

D O I：

10.1016/0925-9635(94)05258-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Results concerning the analysis by time and spatially resolved emission spectroscopy and charged particles detection of the plasma plume created during the interaction between a KrF laser beam and a graphite target are given. Measurements lead to the formulation of an hypothesis about the structure of the plume. Then, hard carbon thin films are realized on different substrates. They have properties close to those of diamond (hardness = 80 GPa, infrared transparency >90%) when the deposition temperature is low (< 100 degrees C).

引用

页码：309 / 313

页数：5

共 11 条

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