DYNAMICS OF THE SI-PT REACTION UNDER PULSED HEAT-FLOW

被引：4

作者：

DANNA, E ^{[1
]}

LEGGIERI, G ^{[1
]}

LUCHES, A ^{[1
]}

MAJNI, G ^{[1
]}

机构：

[1] UNIV MODENA,DEPARTIMENTO FIS,I-41100 MODENA,ITALY

来源：

THIN SOLID FILMS | 1985年 / 129卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(85)90098-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：93 / 102

页数：10

共 10 条

[1]

[Anonymous], 1982, LASER ANNEALING SEMI

[2]

BATTAGLIN G, 1984, MRS S P, V23, P769

[3]

CARSLAW HS, 1959, CONDUCTION HEAT SOLI

[4] PULSED ANNEALING OF SILICON PLATINUM SYSTEMS [J].

DANNA, E ;

LEGGIERI, G ;

LUCHES, A ;

NASSISI, V ;

NAVA, F ;

NOBILI, C .

JOURNAL DE PHYSIQUE, 1983, 44 (NC-5) :421-425

[5] HEAT-FLOW TRANSIENTS IN SI/PT SYSTEMS [J].

DANNA, E ;

LEGGIERI, G ;

LUCHES, A ;

NAVA, F .

THIN SOLID FILMS, 1983, 110 (01) :83-92

[6] DETERMINATION OF KILOVOLT ELECTRON ENERGY DISSIPATION VS PENETRATION DISTANCE IN SOLID MATERIALS [J].

EVERHART, TE ;

HOFF, PH .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (13) :5837-&

[7] PULSED ELECTRON-BEAM FOR SILICON ANNEALING [J].

LEGGIERI, G ;

LUCHES, A ;

NASSISI, V ;

PERRONE, A ;

PERRONE, MR ;

MAJNI, G ;

NAVA, F .

VACUUM, 1982, 32 (01) :9-10

[8]

Luches A., 1983, Physical Processes in Laser-Materials Interactions. Proceedings of the 1980 NATO Advanced Study Institute, P443

[9]

NARAYAN J, 1983, LASER SOLID INTERACT

[10]

TU KN, 1978, THIN FILMS INTERDIFU

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