THE SCOPE AND MECHANISM OF NEW POSITIVE TONE GAS-PHASE-FUNCTIONALIZED PLASMA-DEVELOPED RESISTS

被引：42

作者：

WOLF, TM

TAYLOR, GN

VENKATESAN, T

KRAETSCH, RT

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 07期

关键词：

D O I：

10.1149/1.2115933

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1664 / 1670

页数：7

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