THERMAL ANNEALING STUDY OF CARBON-FILMS FORMED BY THE PLASMA DECOMPOSITION OF HYDROCARBONS

被引：49

作者：

NADLER, MP

DONOVAN, TM

GREEN, AK

机构：

来源：

THIN SOLID FILMS | 1984年 / 116卷 / 1-3期

关键词：

D O I：

10.1016/0040-6090(84)90441-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：241 / 247

页数：7

共 11 条

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