TIME-DEPENDENT BREAKDOWN IN SILICON DIOXIDE FILMS

被引:16
作者
SVENSSON, C [1 ]
SHUMKA, A [1 ]
机构
[1] CALTECH,JET PROP LAB,PASADENA,CA 91103
关键词
D O I
10.1080/00207217508920378
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:69 / 80
页数:12
相关论文
共 13 条
[2]  
Lampert M.A., 1970, CURRENT INJECTION SO
[3]   THEORY OF WORK-FUNCTION CHANGES INDUCED BY ALKALI ADSORPTION [J].
LANG, ND .
PHYSICAL REVIEW B-SOLID STATE, 1971, 4 (12) :4234-+
[4]   FOWLER-NORDHEIM TUNNELING INTO THERMALLY GROWN SIO2 [J].
LENZLINGER, M ;
SNOW, EH .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (01) :278-+
[5]   ACCELERATED DIELECTRIC BREAKDOWN OF SILICON DIOXIDE FILMS [J].
OSBURN, CM ;
CHOU, NJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (10) :1377-1384
[6]   EFFECT OF MOBILE SODIUM IONS ON FIELD ENHANCEMENT DIELECTRIC BREAKDOWN IN SIO2 FILMS ON SILICON [J].
OSBURN, CM ;
RAIDER, SI .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (10) :1369-1376
[7]   DIELECTRIC BREAKDOWN IN SILICON DIOXIDE FILMS ON SILICON .2. INFLUENCE OF PROCESSING AND MATERIALS [J].
OSBURN, CM ;
ORMOND, DW .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (05) :597-+
[8]  
POLLACK SR, 1969, APPLIED SOLID STATE, V1
[9]   TIME-DEPENDENT BREAKDOWN OF SILICON DIOXIDE FILMS [J].
RAIDER, SI .
APPLIED PHYSICS LETTERS, 1973, 23 (01) :34-36
[10]   NONUNIFORM LATERAL IONIC IMPURITY DISTRIBUTIONS AT SI-SIO2 INTERFACES [J].
SILVERSMITH, DJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (11) :1589-+