DEPOSITION AND PHOTOCONDUCTIVITY OF HYDROGENATED AMORPHOUS-SILICON FILMS BY THE PYROLYSIS OF DISILANE

被引：21

作者：

CHU, TL ^{[1
]}

CHU, SS ^{[1
]}

ANG, ST ^{[1
]}

LO, DH ^{[1
]}

DUONG, A ^{[1
]}

HWANG, CG ^{[1
]}

机构：

[1] POLY SOLAR INC,GARLAND,TX 75041

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 04期

关键词：

D O I：

10.1063/1.336525

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1319 / 1322

页数：4

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