SELF-ALIGNED TISI2 FOR BIPOLAR APPLICATIONS

被引：29

作者：

KOH, Y

CHIEN, F

VORA, M

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 06期

关键词：

D O I：

10.1116/1.582941

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1715 / 1724

页数：10

共 33 条

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