FORMATION OF HIGHLY UNIFORM AND DENSE DIAMOND MICROCRYSTAL THIN-FILMS USING A COMBUSTION-FLAME SURROUNDED BY AN INERT-GAS FLOW

被引：16

作者：

ABE, T ^{[1
]}

SUEMITSU, M ^{[1
]}

MIYAMOTO, N ^{[1
]}

机构：

[1] TOHOKU UNIV,ELECT COMMUN RES INST,SENDAI,MIYAGI 980,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1993年 / 74卷 / 05期

关键词：

D O I：

10.1063/1.354530

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An inert-gas curtain method, in which a combustion flame of oxygen/acetylene mixture is protected from the air by a surrounding inert-gas flow, has been developed for the deposition of microcrystalline diamond films. As a result, highly uniform and highly dense microcrystal films of diamonds possessing the quality of natural diamond were successfully prepared. The inert-gas flow allows the hydrocarbon radicals in the flame to be varied for preferential deposition of diamonds.

引用

页码：3531 / 3533

页数：3

共 5 条

[1] FORMATION OF 250-MU-M-DIAMETER DIAMOND CRYSTALS BY COMBUSTION FLAME METHOD - EFFECTS OF PREFORMATION OF MOLYBDENUM OXIDE ON THE SUBSTRATE [J].

ABE, T ;

SUEMITSU, M ;

MIYAMOTO, N ;

SATO, N .

JOURNAL OF APPLIED PHYSICS, 1993, 73 (02) :971-976

[2] MICROCRYSTALLINE DIAMOND DEPOSITION USING A COMBUSTION FLAME OF ACETYLENE AND OXYGEN WITH A MAGNETIC-FIELD [J].

ABE, T ;

SUEMITSU, M ;

MIYAMOTO, N ;

SATO, N .

APPLIED PHYSICS LETTERS, 1991, 59 (08) :911-913

[3] SYNTHESIS OF DIAMOND THIN-FILMS BY THERMAL CVD USING ORGANIC-COMPOUNDS [J].

HIROSE, Y ;

TERASAWA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (06) :L519-L521

[4] VAPOR-DEPOSITION OF DIAMOND PARTICLES FROM METHANE [J].

MATSUMOTO, S ;

SATO, Y ;

KAMO, M ;

SETAKA, N .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (04) :L183-L185

[5] GROWTH OF DIAMOND THIN-FILMS BY DC PLASMA CHEMICAL VAPOR-DEPOSITION AND CHARACTERISTICS OF THE PLASMA [J].

SUZUKI, K ;

SAWABE, A ;

INUZUKA, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (01) :153-157

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