SEMICONDUCTOR SURFACE STRUCTURES

被引:227
作者
Kahn, A. [1 ]
机构
[1] Princeton Univ, Dept Elect Engn & Comp Sci, Princeton, NJ 08544 USA
关键词
D O I
10.1016/0167-5729(83)90006-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this article, we indicate the status of our current understanding of semiconductor surface geometries. We review the various experimental and theoretical structure determination techniques which have been developed and evaluate their performance on semiconductor surfaces. We survey the atomic geometries of non-polar and polar surfaces of compound semiconductors and specify the current state of understanding of Si surfaces. Finally we indicate the atomic geometries of semiconductor interfaces.
引用
收藏
页码:193 / 300
页数:108
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