A METHOD FOR DOSING SOLID SOURCES FOR MOVPE - EXCELLENT REPRODUCIBILITY OF DOSIMETRY FROM A SATURATED SOLUTION OF TRIMETHYLINDIUM

被引：19

作者：

FRIGO, DM ^{[1
]}

VANBERKEL, WW ^{[1
]}

MAASSEN, WAH ^{[1
]}

VANMIER, GPM ^{[1
]}

WILKIE, JH ^{[1
]}

GAL, AW ^{[1
]}

机构：

[1] BILLITON PRECURSORS BV,6800 AP ARNHEM,NETHERLANDS

来源：

JOURNAL OF CRYSTAL GROWTH | 1992年 / 124卷 / 1-4期

关键词：

D O I：

10.1016/0022-0248(92)90444-N

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

A new precursor system for MOVPE of In-containing layers consists of trimethylindium (TMI) in contact with, and dissolved to saturation in, an inert, involatile, liquid solvent. When placed in a conventional bubbler the TMI vapour is entrained by pickup gas bubbling through the resulting solution. Saturation of this solution is maintained by continuous dissolution of excess solid TMI. Dosimetry from 2 sources containing different amounts of solution are shown to be more reproducible than that from TMI alone. The electrical and optical properties of layers grown from the new source are excellent.

引用

页码：99 / 105

页数：7

共 18 条

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[2]

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[3]

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