THE RADIATION-CHEMISTRY OF POLY(METHYL METHACRYLATE) POLYMER RESISTS

被引:31
作者
LEHOCKEY, EM
REID, I
HILL, I
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 04期
关键词
D O I
10.1116/1.575014
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2221 / 2225
页数:5
相关论文
共 12 条
[1]  
Fleischmann M., 1984, COMPR TREAT, V8, P373
[2]   SOLUBILITY RATE OF POLY-(METHYL METHACRYLATE), PMMA, ELECTRON-RESIST [J].
GREENEICH, JS .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (12) :1669-1671
[3]   DEVELOPER CHARACTERISTICS OF POLY-(METHYL METHACRYLATE) ELECTRON RESIST [J].
GREENEICH, JS .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (07) :970-976
[4]   ON DEGRADATION AND ELECTRON SPIN RESONANCE SPECTRA OF IRRADIATED METHACRYLATE POLYMERS [J].
KIRCHER, JF ;
SLIEMERS, FA ;
MARKLE, RA ;
GAGER, WB ;
LEININGE.RI .
JOURNAL OF PHYSICAL CHEMISTRY, 1965, 69 (01) :189-&
[5]   VAPOR DEVELOPMENT OF PMMA RESISTS UNDER X-RAY-EXPOSURE [J].
LEHOCKEY, EM ;
REID, I .
SURFACE AND INTERFACE ANALYSIS, 1988, 11 (6-7) :302-306
[6]  
LEHOCKEY EM, 1988, THESIS U W ONTARIO
[7]  
LEHOCKEY EM, 1978, CAN J PHYS, V65, P975
[8]  
MALCOLM D, 1972, RAD CHEM MACROMOLECU
[9]   HIGH-ENERGY RADIATION EFFECTS ON POLYACRYLATES AND POLYMETHACRYLATES [J].
SHULTZ, AR .
JOURNAL OF POLYMER SCIENCE, 1959, 35 (129) :369-380
[10]   LIGHT SCATTERING AND VISCOSITY STUDY OF ELECTRON-IRRADIATED POLYSTYRENE AND POLYMETHACRYLATES [J].
SHULTZ, AR ;
ROTH, PI ;
RATHMANN, GB .
JOURNAL OF POLYMER SCIENCE, 1956, 22 (102) :495-507